Study of Microrelief Influence on Optical Output Coefficient of GaN-based LED

Статья в журнале

This work is devoted to the investigation of the influence on the light output coefficient of antireflective coatings by different configurations of the micro-relief formed on the light output surface of a GaN-based LED. The technology of the micro-relief fabrication in SiO2-based antireflective coatings was developed with the use of electron-beam lithography (EBL) and contact photolithography. Simulation of the influence of the micro-relief of various proportions and configurations on the optical output coefficient was implemented. It was discovered that the micro-relief made with electron-beam lithography and contact hotolithography increased the optical output coefficient.

Журнал:

• KnE Engineering
• Knowledge E (Dubai)

Библиографическая запись: Danilina, T. I. Study of Microrelief Influence on Optical Output Coefficient of GaN-based LED / T. I. Danilina, I. A. Chistoyedova, A. A. Popov // KnE Engineering. – 2018. – Vol. 3(6). – P. 254–260. – DOI: 10.18502/keg.v3i6.3001