Ceramic coating deposition by electron beam evaporation
Статья в журнале
We describe a new method for the deposition of protective ceramic-based coatings. The novelty of the method lies in the unique interaction of the electron beam with a dielectric target, in which ions in the beam-produced plasma neutralize the target surface charge build-up. This effect is brought about by the use of our novel forevacuum-pressure, plasma-cathode electron beam source, which can produce energetic, focused electron beams, with associated beam-produced plasmas, in the previously inaccessible pressure range of 1–100 Pa. The work described here demonstrates the evaporation of aluminum oxide ceramic by electron beam bombardment and the subsequent deposition of an alumina coating. A significant increase in the microhardness of the ceramic-coated Ti substrate and a uniform depth-distribution of the elemental composition has been determined. The approach described here opens up new opportunities for the deposition of coatings in variousfields of industry.
- Surface & Coatings Technology
Oks, E. M. Ceramic coating deposition by electron beam evaporation / Oks E. M. [et. al.] // Surface and Coatings Technology. - №325. - Vol. 325. - P. 1-6