Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range
Статья в журнале
The industrial quadrupole RGA-100 residual gas analyzer was modified for the research of electron beam-generated plasma at forevacuum pressure range. The standard ionizer of the RGA-100 was replaced by three electrode extracting unit. We made the optimization of operation parameters in order to provide the maximum values of measured currents of any ion species. The modified analyzer was successfully tested with beam plasma of argon, nitrogen, oxygen and hydrocarbons.
Журнал:
- Review of Scientific Instruments
- American Institute of Physics (College Park)
Библиографическая запись: Zolotukhin D. B. Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range / D. B. Zolotukhin [et. al.] - Vol. 86, Issue 12. - P. 123301.
Ключевые слова:
RESIDUAL GAS ANALYZERS QUADRUPOLE MASS ANALYZERS PRESSURE RANGES ELECTRON-BEAM-GENERATED PLASMAS ION SPECIESИндексируется в:
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