THE INFLUENCE OF THE WORKING GAS COMPOSITION ON THE MASS-TO-CHARGE COMPOSITION OF IONS IN THE BEAM PLASMA DURING THE EVAPORATION OF AN YSZ TARGET BY AN ELECTRON BEAM

Статья в журнале

The paper presents the results of a study on the mass-to-charge composition of ions in the beam plasma generated during the evaporation of a solid-state ceramic target made of yttria-partially stabilized zirconia (YSZ) in an environment of inert and reactive gases by an electron beam in the forevacuum pressure range. Monitoring of the mass-to-charge composition of beam plasma ions was carried out using a modernized RGA-300 residual atmosphere mass analyzer. The influence of the working gas composition on the mass spectra of ions of the evaporated target material is shown.

Журнал:

• PLASMA PHYSICS REPORTS
• Pleiades Publishing, Ltd. (Road Town, Tortola) (Москва)

Библиографическая запись: The Influence of the Working Gas Composition on the Mass-to-Charge Composition of Ions in the Beam Plasma during the Evaporation of an YSZ Target by an Electron Beam / A. V. Tyunkov, A. A. Andronov, D. B. Zolotukhin [et al.] // Plasma Physics Reports. – 2025. – Vol. 51, No. 3. – P. 374-378. – DOI 10.1134/S1063780X25602494.

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• ВАК ( https://www.elibrary.ru/item.asp?id=82620937 )
• Scopus ( https://www.scopus.com/inward/record.url?eid=2-s2.0-105010966810&partnerID=MN8TOARS )