Parameters and properties of a pulsed planar vacuum magnetron discharge

Статья в журнале

We have developed a vacuum (gasless) magnetron discharge initiated by a vacuum arc plasma. The discharge operating conditions for different magnetron target materials have been determined. The mass-to-charge plasma composition and its evolution during a discharge current pulse were measured. It is shown that, after transient processes of cathode outgassing and purification, the plasma ion component consists mainly of singly-charged ions of the magnetron target material. The measured total ion current from the vacuum magnetron discharge plasma is up to 7.5% of the discharge current.

Журнал:

• Vacuum
• Elsevier Ltd (Oxford)
• Индексируется в Scopus, Web of Science

Библиографическая запись: Parameters and properties of a pulsed planar vacuum magnetron discharge / A. V. Vizir [et. al.] // Vacuum. - 2020. - Vol. 178. - P. 109400. - DOI: 10.1016/j.vacuum.2020.109400

Индексируется в:

• Scopus ( https://www.scopus.com/record/display.uri?eid=2-s2.0-85084250616&origin=resultslist )
• Web of science ( http://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=1&SID=E2R176pDMorS68DrbYl&page=1&doc=8 )
• РИНЦ ( https://www.elibrary.ru/item.asp?id=43277829 )