Different stages of electron-beam evaporation of ceramic target in medium vacuum
Статья в журнале
We present experimental results and numerical simulation of electron-beam heating, melting, and evaporation of a solid dielectric (aluminum oxide ceramic) in medium vacuum (1-100 Pa). The indicated processes occurred as a result of interaction between a powerful continuous electron beam, generated by a fore-vacuum plasma-cathode electron source, and the surface of the solid ceramic target. During the interaction with the target, the electron beam ionized a part of the evaporated material, and starting from the onset of ceramic melting up to intense evaporation, the beam plasma has been containing ions of the ceramic material. We suggest an optimal choice of ceramic evaporation regime for the purpose of coating deposition.
Журнал:
- Journal of Applied Physics
- American Institute of Physics Inc. (New York City)
- Индексируется в Scopus, Web of Science
Библиографическая запись: Different stages of electron-beam evaporation of ceramic target in medium vacuum / Yu. G. Yushkov [et al.] // Journal of Applied Physics. – 2020. – Vol. 127. – Iss. 11. – P. 113303. – DOI: 10.1063/1.5142420
Индексируется в:
- Scopus ( https://www.scopus.com/record/display.uri?eid=2-s2.0-85082401978&origin=resultslist )
- Web of science ( https://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=8&SID=D1KQ3wlIGnccCD83ima&page=1&doc=1 )
- РИНЦ ( https://www.elibrary.ru/item.asp?id=43269360 )