Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range

Статья в журнале

We present experimental results on the deposition of multi-layer heat-conducting coatings of aluminum oxide and aluminum nitride on silicon substrates. We estimate the time dependencies of the temperature increase for an uncoated substrate and for similar samples covered by this kind of multi-layer coating. The composition of the coatings and their thermal properties have been investigated.

Журнал:

Ceramics International
Elsevier Science Publishing Company, Inc. (Amsterdam)
Индексируется в Scopus, Web of Science

Библиографическая запись: Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range / Y. G. Yushkov [et al.] // Ceramics International. – 2020. – Vol. 46. – Iss. 13. – P. 21190-21195. – DOI: 10.1016/j.ceramint.2020.05.197

Ключевые слова:

MULTI-COMPONENT BEAM-PRODUCED PLASMA ALUMINUM OXIDE CERAMICS ALUMINUM NITRIDE CERAMICS THERMAL CONDUCTIVITY OF CERAMICS ELECTRON BEAM

Индексируется в:

Авторы: Юшков Ю. Г., Окс Е. М., Тюньков А. В., Золотухин Д. Б., Ющенко А. Ю., Юшков А. Ю.

Год издания: 2020

Страницы: 21190 - 21195

Язык: Английский

DOI: 10.1016/j.ceramint.2020.05.197