On the effect of ceramic target composition on coatings deposited by electron-beam evaporation at forevacuum pressure

Статья в журнале

We have explored the features of coatings deposited by electron-beam evaporation of ceramic targets with different elemental composition in the fore-vacuum pressure range. The mass-to-charge composition of the beam-plasma formed, and the composition and characteristics of the coatings deposited by evaporation of ceramic targets of various different compositions have been investigated. The influence of target material elemental composition on the parameters of coatings deposited on a titanium substrate are assessed, including elemental composition, surface profile, microhardness, and Young's modulus.

Журнал:

Ceramics International
Elsevier Science Publishing Company, Inc. (Amsterdam)
Индексируется в Scopus, Web of Science

Библиографическая запись: On the effect of ceramic target composition on coatings deposited by electron-beam evaporation at forevacuum pressure // Y.G. Yushkov [et al.] //Ceramics International. – 2020. – Vol. 46. – Iss. 17. – P. 27641-27646. – DOI: 10.1016/j.ceramint.2020.07.259

Ключевые слова:

MULTI-COMPONENT BEAM-PLASMA ALUMINA CERAMICS ELECTRON BEAM MEDIUM VACUUM ELECTRON-BEAM EVAPORATION MASS-TO-CHARGE PLASMA ION COMPOSITION

Индексируется в:

Авторы: Юшков Ю. Г., Окс Е. М., Оскомов К. В., Тюньков А. В., Яковлев Е. В., Ющенко А. Ю., Пласкеев А. А., Золотухин Д. Б.

Год издания: 2020

Страницы: 27641 - 27646

Язык: Английский

DOI: 10.1016/j.ceramint.2020.07.259